TERA-print®
A unique blend of technical capabilities
Resolution
Versatility
Throughput
One instrument, limitless possibilities.
Meet E series 2.0
The first commercial beam pen lithography (BPL) tool.
Featured TERA-Fab® Applications
Featured Publications
DESKTOP NANOFABRICATION WITH MASSIVELY MULTIPLEXED BEAM PEN LITHOGRAPHY
Liao, X., Brown, K. A., Schmucker, A. L., Liu, G., He, S., Shim, W., Mirkin, C. A., Nature Comms., 2013, 4, 2103